Model	EHP12-22R
Wafer Size	12 inch
Temperature Range	MAX 250¡É
Temperature Uniformity	R¡Â0.25¡É at 150¡É
Material	Upper Plate : Al6061  Bottom Plate : SUS316 Plate
Surfaces Coating	Upper Plate : Hard Anodizing  Bottom Plate : SUS316 Plate
Heater Cartridge	heater Module : 220VAC , 800W
Bottom heat protector	Mica, 1t
Internal Sensor	RTD(Pt100¥Ø Class "A")
Physical Size	¥Õ320*24t
Cable	Power Cord : AC220V, 10Amax. 2-Wire,  1m Long Sensor Cord : 3-Wire, 1m Long