Model
EHP8-12R
Wafer Size
8 inch
Temperature Range
MAX 250℃
Temperature Uniformity
R≤0.25℃ at 150℃
Material
Upper Plate : Al6061
Bottom Plate : SUS316 Plate
Surfaces Coating
Upper Plate : Hard Anodizing
Heater Cartridge
heater Module : 220VAC , 800W
Bottom heat protector
Mica, 1t
Internal Sensor
RTD(Pt100Ω Class "A")
Physical Size
Φ220*24t
Cable
Power Cord : AC220V, 10Amax. 2-Wire,
1m Long Sensor Cord : 3-Wire, 1m Long