8inch Hot Plate

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Model

EHP8-12R

Wafer Size

8 inch

Temperature Range

MAX 250¡É

Temperature Uniformity

R¡Â0.25¡É at 150¡É

Material

Upper Plate : Al6061

Bottom Plate : SUS316 Plate

Surfaces Coating

Upper Plate : Hard Anodizing

Bottom Plate : SUS316 Plate

Heater Cartridge

heater Module : 220VAC , 800W

Bottom heat protector

Mica, 1t

Internal Sensor

RTD(Pt100¥Ø Class "A")

Physical Size

¥Õ220*24t

Cable

Power Cord : AC220V, 10Amax. 2-Wire,

1m Long Sensor Cord : 3-Wire, 1m Long